Nanochem Purification Overview


Nanochem Gas Purifiers are designed for Ultra High Purity applications – including comprehensive solutions for source, point-of-use, bulk, and proximate purification – delivering up to nine 9’s purity gas.


Since 1985, MATHESON Nanochem® purifiers have provided unprecedented purification solutions serving a wide range of industries including semiconductor manufacturing, LED production, energy processes, welding, and many more.


Nanochem UHP Gas Purification.

Learn more about Nanochem capabilities - get the Nanochem Purifier Overview Brochure.

Go to the Nanochem Product Data page on this website to learn more about Nanochem:

  • types of gas purification media
  • choices for purifier hardware configurations


Gas Purification:
High Performance Purification Media and Specialized Hardware.

L-300 Purifier

Nanochem® purifiers combine gas-specific purification media and ultra-high purity hardware in one system to eliminate impurities caused by:

  • Upstream leaks
  • Improper cylinder change-outs
  • Increasing impurity concentration during gas cylinder depletion
  • Gas system component contamination
  • Virtual leaks from component / piping "dead pockets" and soft seats


Gas Purification:
Long Purifier Lifetime and High Purifier Efficiency.

Nanochem® purifiers offer the highest lifetimes and the best efficiencies for impurity removal. Nanochem purifiers are available for:

  • Silicon-source gases
  • Nitride gases
  • Etchants
  • Purge gases
  • Dopant gases
  • Volatile metals
  • Carrier gases



Remove oxygen, water, and other contaminants to UHP levels

Oxygen, moisture and other contaminants are removed to < 100 ppt (parts per trillion) and are limited only by the detection limits of even state-of-the-art analytical instrumentation.

Compact and easy to use, Nanochem® purifiers can be installed within the gas cabinet or at the process tool. Most purifiers require no heating or cooling and are capable of handling a broad range of flows and pressures.

MATHESON has one of the most extensive, in-house evaluation laboratories in the industry to assess the quality of gas system components. The benefit is that components selected for Nanochem® purification products are of the highest quality available.

"Live gas" testing is done to ensure purifiers meet or exceed performance specifications in the specific process gas for which they are marketed.


Gas Purification Performance Benefits & Applications

Nanochem® purifiers offer a number of benefits, such as reduced equipment downtime and protection against fluctuations in gas supply quality and upstream system upsets. Typical performance benefits for the semiconductor / compound semiconductor industry are:

  • Increased carrier concentration, increased mobility
  • Faster crystal growth rates
  • Improved uniformity of surface morphology
  • Fewer defects in epi layers and substrates
  • Longer equipment life & reduced component corrosion

Semiconductor applications include manufacture of ICs and high brightness LEDs. Welding applications include piping for semiconductor fabs, manufacture of aerospace components, and manufacture of process equipment for chemical and biotech industries.





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Gases We Purify (partial listing) 

Acetylene Hydrogen Bromide
Air Hydrogen Chloride
Ammonia Hydrogen Fluoride
Argon Hydrogen Selenide
Argon (welding) Hydrogen Sulfide
Arsine Isobutane
Arsine (1-10%) Krypton
Boron Trchloride Methane
Boron Trifluoride Methyl Fluoride
Butane Methyl Silane
Butene Methylchloride
Carbon Dioxide MethylMercaptan
Carbon Disulfide Monochlorosilane
Carbon Monoxide Monomethyl Silane
Carbon Tetrachloride Neon
Carbon Tetrafluoride Nitric Oxide
Carbonyl Sulfide Nitrogen
Chlorine Nitrogen Dioxide
Chlorocarbons Nitrous Oxide
Clean Dry Air Octafluorocyclobutane
Cyclo-hydrocarbons Octafluorocyclopentene
Deuterium Octafluoropropane
Dichlorosilane Oxygen
Difluoromethane Ozone
Disilane Perfluorobutane
Ethane Phosgene
Ethylene Phosphine
Fluorocarbons Phosphine (1-10%)
Germane Propane
Germane (1-10%) Propylene
Germanium Tetrachloride Silane
Germanium Tetrafluoride Silicon Tetrachloride
Halocarbons Silicon Tetrafluoride
Helium Sulfur Dioxide
Hexafluorobutadiene Sulfur Hexafluoride
Hexafluoroethane Trichlorosilane
Hexafluoropropylene Trifluoromethane
Hydrocarbons Xenon