Gases for Semiconductor Fabrication. In addition to global leadership in gases for electronics, MATHESON also offers related equipment as well as site operations management services.
As a global leader among suppliers of gases and materials for semiconductor fabrication, MATHESON is a sustainable source for your gas supply requirements.
You can be confident that your gases are produced, purified, and packaged to world class quality and safety standards.
Depend on MATHESON not only for gases and materials, but also for UHP gas handling equipment, and for comprehensive site services as well.
MATHESON's gases and gas mixtures for electronics manufacturing and semiconductor fabrication are also covered in the Electronics section of this website.
The Electronics section also provides information covering:
For reference information about cylinders, conversions, and safety, visit our Publications Library.
General Information (Semiconductor Gas Mixtures)
Halocarbon 116 (Hexafluoroethane)
Halocarbon 14 (Tetrafluoromethane)
Halocarbon 218 (Perfluoropropane)
Halocarbon 23 (Trifluoromethane)
Halocarbon 32 (Difluoromethane)
Halocarbon 41 (Methyl Fluoride)
Halocarbon 4110 (Octafluorocyclopentene)
Halocarbon C318 (Octafluorocyclobutane)