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Semiconductor Gas Mixtures Data
General Information (Semiconductor Gas Mixtures)
Semiconductor Pure Gases Data
Halocarbon 116 (Hexafluoroethane)
Halocarbon 14 (Tetrafluoromethane)
Halocarbon 218 (Perfluoropropane)
Halocarbon 23 (Trifluoromethane)
Halocarbon 32 (Difluoromethane)
Halocarbon 41 (Methyl Fluoride)
Halocarbon 4110 (Octafluorocyclopentene)
Halocarbon C318 (Octafluorocyclobutane)