Also see:
Semiconductor Pure Gases
Semiconductor Gas Mixtures
UHP Gas Purification
UHP Gas Equipment
MOCVD
Electronics Literature Center
Semiconductor Pure Gases
Click links below to view gas details.
Halocarbon 116 (Hexafluoroethane)
Halocarbon 14 (Tetrafluoromethane)
Halocarbon 218 (Perfluoropropane)
Halocarbon 23 (Trifluoromethane)
Halocarbon 32 (Difluoromethane)
Halocarbon 41 (Methyl Fluoride)
Halocarbon 4110 (Octafluorocyclopentene)
Halocarbon C318 (Octafluorocyclobutane)