Electronics Gases Purification


Purification. As gas purification experts, MATHESON is keenly aware of the challenges you face involving gas purification, flow rates, pressures, purifier capacity, process contamination, and gas purifier lifetime.


Nanochem® Gas Purifiers enable the "extreme purification" of gases used in wafer and semiconductor fabrication.

Including the removal of dopants and volatile metals.


"Live gas" testing is done to ensure that Nanochem® gas purifiers meet or exceed performance specifications in the specific gas for which they are marketed.

Nanochem® purifiers remove: Gas Purifier Selection and  Configuration

  • moisture (water)
  • hydrocarbons
  • halocarbons
  • carbon dioxide
  • oxygen
  • dopants
  • volatile metals
  • more

Please inquire regarding specific impurities of interest to your application.

On this page is a list of gases we purify using Nanochem® gas purifiers.

If a gas of interest to your application does not appear here, please Contact Us.

Additional details concerning all of our products for purification (including hardware, media, and featuring an interactive online purifier selection tool) can be found in the Purification section of this website.




Gases We Purify (partial listing)

For a complete overview of all of our Purification Products and Technology, see the Purification section of this website.


Acetylene Hydrogen Bromide
Air Hydrogen Chloride
Ammonia Hydrogen Fluoride
Argon Hydrogen Selenide
Argon (welding) Hydrogen Sulfide
Arsine Isobutane
Arsine (1-10%) Krypton
Boron Trchloride Methane
Boron Trifluoride Methyl Fluoride
Butane Methyl Silane
Butene Methylchloride
Carbon Dioxide MethylMercaptan
Carbon Disulfide Monochlorosilane
Carbon Monoxide Monomethyl Silane
Carbon Tetrachloride Neon
Carbon Tetrafluoride Nitric Oxide
Carbonyl Sulfide Nitrogen
Chlorine Nitrogen Dioxide
Chlorocarbons Nitrous Oxide
Clean Dry Air Octafluorocyclobutane
Cyclo-hydrocarbons Octafluorocyclopentene
Deuterium Octafluoropropane
Dichlorosilane Oxygen
Difluoromethane Ozone
Disilane Perfluorobutane
Ethane Phosgene
Ethylene Phosphine
Fluorocarbons Phosphine (1-10%)
Germane Propane
Germane (1-10%) Propylene
Germanium Tetrachloride Silane
Germanium Tetrafluoride Silicon Tetrachloride
Halocarbons Silicon Tetrafluoride
Helium Sulfur Dioxide
Hexafluorobutadiene Sulfur Hexafluoride
Hexafluoroethane Trichlorosilane
Hexafluoropropylene Trifluoromethane
Hydrocarbons Xenon